2022
DOI: 10.1108/mi-04-2022-0065
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Atomic structure for AlN grown on different plane orientation of sapphire via numerical study

Abstract: Purpose This study aims to present a numerical study of atomic structure for aluminium nitride (AlN) when the crystal was assumed grown on different orientation of sapphire substrate. The change of the AlN atomic structure with sapphire orientation was associated to the interface between the AlN and the sapphire. The results from this study would provide a guideline in selecting suitable orientation of sapphire for obtaining desirable AlN crystals, in particular, for reducing threading dislocation density in t… Show more

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