2020
DOI: 10.3390/coatings10100945
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Au Doping ZnO Nanosheets Sensing Properties of Ethanol Gas Prepared on MEMS Device

Abstract: Sensitivity of the Micro Electro Mechanical System (MEMS) device ZnO nanosheets sensor and the Au doped ZnO nanosheets sensor has been investigated. The ZnO samples have been prepared using Hydrothermal synthesis at 90 °C. The prepared ZnO nanostructure is tested for structural morphology and crystallinity properties. The elemental analysis of the ZnO sample and Au–ZnO samples are tested by using Energy Dispersive X-ray Spectroscopy (EDS) spectrum analysis. MEMS device microheater is designed and prepared for … Show more

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Cited by 27 publications
(15 citation statements)
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“…It is now widely accepted that the control of these parameters can be exerted gainfully through the synthesis and device fabrication method. Amongst the most impactful control pathways are the oxide nanostructure and engineering of the interface [56,[58][59][60], the deposition method, posttreatment such as thermal decomposition [60], and doping [61][62][63][67][68][69]. The first reported application of ZnO as an electron transporting layer (ETL) for PSCs was by Kumar et al [70].…”
Section: Application Of Zno Nanostructures In Perovskite Solar Cellsmentioning
confidence: 99%
“…It is now widely accepted that the control of these parameters can be exerted gainfully through the synthesis and device fabrication method. Amongst the most impactful control pathways are the oxide nanostructure and engineering of the interface [56,[58][59][60], the deposition method, posttreatment such as thermal decomposition [60], and doping [61][62][63][67][68][69]. The first reported application of ZnO as an electron transporting layer (ETL) for PSCs was by Kumar et al [70].…”
Section: Application Of Zno Nanostructures In Perovskite Solar Cellsmentioning
confidence: 99%
“…These nanopores are distributed non-uniformly with varying diameters. The nanopores' structure shows a high possibility for gas adsorption on the film surface, and this allows increasing the sensitivity of the ZnO/CNTs film at room temperature [43][44][45]. Figure 2d,e shows the surface roughness of ZnO/CNTs and ZnO analyzed by ImageJ software.…”
Section: Morphological Analysismentioning
confidence: 99%
“…Microelectromechanical system (MEMS) techniques are widely used to fabricate gas sensing devices. 148,149 Many literature reports based on MEMS fabricated gas sensors using Au-based materials have been published [150][151][152] in recent years. MEMS technology also offers a single miniaturized system to complex multifunctional systems.…”
Section: Gold-cnts Nanostructuresmentioning
confidence: 99%