AZO electrodes deposited by atomic layer deposition for OLED fabrication

Dugrenil, Benoit; Séguy, Isabelle; Lee, H.; Camps, Thierry; Lin, Yu Chang; Doucet, Jean Baptiste; Chiu, Ying-Shuo; Salvagnac, Ludovic; Bedel-Pereira, Eléna; Ternisien, Marc; C,, Lee,; Bardinal, Véronique

doi:10.1117/12.2052504

Cited by 4 publications

(4 citation statements)

References 7 publications

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“…To the best of our knowledge, this work is the world’s first on TrOLED, and it is suitable for applications such as AR, smart glasses, and MR, with the AZO/Ag/AZO electrode that is capable of maximizing the transparency and flexibility for the wearable device. Furthermore, compared to other studies where the AZO or AZO/Ag/AZO anode is used for OLED, despite being a TrOLED, the characteristics of our device are impressive [ 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 ].…”

Section: Discussionmentioning

confidence: 72%

Highly Transparent Red Organic Light-Emitting Diodes with AZO/Ag/AZO Multilayer Electrode

Lee,

Song,

Seo

et al. 2024

Micromachines

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Free-form factor optoelectronics is becoming more important for various applications. Specifically, flexible and transparent optoelectronics offers the potential to be adopted in wearable devices in displays, solar cells, or biomedical applications. However, current transparent electrodes are limited in conductivity and flexibility. This study aims to address these challenges and explore potential solutions. For the next-generation transparent conductive electrode, Al-doped zinc oxide (AZO) and silver (AZO/Ag/AZO) deposited by in-line magnetron sputtering without thermal treatment was investigated, and this transparent electrode was used as a transparent organic light-emitting diode (OLED) anode to maximize the transparency characteristics. The experiment and simulation involved adjusting the thickness of Ag and AZO and OLED structure to enhance the transmittance and device performance. The AZO/Ag/AZO with Ag of 12 nm and AZO of 32 nm thickness achieved the results of the highest figure of merit (FOM) (Φ550 = 4.65 mΩ−1) and lowest roughness. The full structure of transparent OLED (TrOLED) with AZO/Ag/AZO anode and Mg:Ag cathode reached 64.84% transmittance at 550 nm, and 300 cd/m2 at about 4 V. The results demonstrate the feasibility of adopting flexible substrates, such as PET, without the need for thermal treatment. This research provides valuable insights into the development of transparent and flexible electronic devices.

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Section: Discussionmentioning

confidence: 72%

Highly Transparent Red Organic Light-Emitting Diodes with AZO/Ag/AZO Multilayer Electrode

Lee,

Song,

Seo

et al. 2024

Micromachines

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“…AZO was deposited on the DBRs by atomic layer deposition technique (ALD). The deposition conditions were optimized to obtain a sheet resistance of 54 /sq and a transmission of 79% [17] The reflectivity spectra of the DBR/AZO/glass stacks and their uniformity along the wafers were measured before MOLED fabrication and found in good agreement with modelling (not shown here).…”

Section: Methodsmentioning

confidence: 72%

“…The Fig. 2 (a) displays the calculated reflectivity spectra of three different MOLEDs having 3 different numbers of pairs in the 470nm-centered DBR [17]. For each of them, the thickness of the organic stack was finely tuned to get an optical cavity length fully resonant at 470 nm.…”

Section: Resultsmentioning

confidence: 99%

Design and optimization of a blue fluorescent microcavity-organic light-emitting diode (MOLED) on AZO anode for an algae excitation light source application

Lozano-Hernández¹,

Doucet²,

Reig³

et al. 2023

Materials Today: Proceedings

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“…diffusion of indium elements into the device [13], similar effect may also exist in QLEDs with a normal structure that having organic materials next to the ITO layer. Besides, from the view of practicality, transparent electrode of indium with poor flexibility used in QLEDs has a high cost due to the scarcity of indium element.…”

Section: Introductionmentioning

confidence: 82%

Inverted structural quantum dot light-emitting diodes based on Al-doped ZnO electrode

et al. 2017

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As an indium-free transparent conducting film, Al-doped zinc oxide (AZO) was prepared by magnetron sputtering technique, exhibiting good electrical, optical and surface characteristics. UPS/XPS measurements show that AZO and zinc oxide nanoparticles (ZnO NPs) have matched energy level that can facilitate the electron injection from AZO to ZnO NPs. Inverted structural green quantum dot light-emitting diodes based on AZO cathode were fabricated, which exhibits a maximum luminance up to 178 000 cd m, and a maximum current efficiency of 10.1 cd A. Therewith, combined with the simulated space-charge-limited current (SCLC) theory, the measured current density-voltage characteristics of charge-only devices were analyzed. It demonstrated that AZO and ZnO NPs had much better electron injection efficiency than ITO, showing a electron injection efficiency close to 100%. By studying the relationship between the electric field and the current density, the measured curve of AZO-based devices nearly fits the theoretical curve of SCLC and the AZO electrode has a better ohmic contact with ZnO NPs than ITO.

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AZO electrodes deposited by atomic layer deposition for OLED fabrication

Cited by 4 publications

References 7 publications

Highly Transparent Red Organic Light-Emitting Diodes with AZO/Ag/AZO Multilayer Electrode

Highly Transparent Red Organic Light-Emitting Diodes with AZO/Ag/AZO Multilayer Electrode

Design and optimization of a blue fluorescent microcavity-organic light-emitting diode (MOLED) on AZO anode for an algae excitation light source application

Inverted structural quantum dot light-emitting diodes based on Al-doped ZnO electrode

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