Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography

Desjardins, Kewin; Medjoubi, Kadda; Sacchi, M.; Popescu, Horia; Gaudemer, Roland; Belkhou, Rachid; Stanescu, Stefan; Swaraj, Sufal; Besson, Adrien; Vijayakumar, Jaianth; Pautard, Stéphanie; Noureddine, Arafat; Mercère, Pascal; Silva, Paulo Da; Orsini, F.; Menneglier, Claude; Jaouen, N.

doi:10.1107/s160057752001262x

Cited by 36 publications

(41 citation statements)

References 32 publications

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“…This first version is equipped with a 'standard' GPIXEL CMOS-BSI sensor developed for visible spectrum applications, the GSENSE400BSI-TVSIB. As reported by Desjardins et al (2020), the sensor has a maximum quantum efficiency (QE) around an energy of 1000 eV and a poor efficiency for lower beam energies (due to the surface antireflection protective coating). Compared to the prototype noncoated version, GSENSE400BSI-GP, or the latest version introduced recently by GPIXEL, GSENSE400BSI-Pulser (Harada et al, 2020; https://www.gpixel.com), the efficiency of GSENSE400BSI-TVSIB is only 20% around 50 eV.…”

Section: Methodsmentioning

confidence: 92%

“…As described previously, the magnetic scattering intensity has been measured as a function of the FEL intensity. In order to safely test the linearity of the CMOS, the FEL intensity has been kept far from the damage threshold of the sensor based on our previous X-ray characterization (Desjardins et al, 2020).…”

Section: Cmos Camera Linearity At a Felmentioning

confidence: 99%

“…It is based on 2048 Â 2048 pixels of 11 mm 2 with two gains and a combined gain mode to achieve the high dynamic range (HDR). The illumination on the back side (BSI), the thin silicon epitaxial thickness and the entrance window coating layer enable a good efficiency to be obtained over the entire XUV and soft X-ray domain (Desjardins et al, 2020). The dynamic range can reach 92 dB with a low electronic noise (down to 2 e À RMS) and a relatively large charge full-well capacity (up to 100 ke À ).…”

Section: Introductionmentioning

confidence: 99%

“…The sensor has met with a certain success and it is already integrated by several camera manufacturers for UV and visible applications (https://andor.oxinst.com, https://www.photo metrics.com, https://www.ximea.com, https://www.pco.de, http://www.tucsen.com, etc.). Recently, two versions have been evaluated at beamlines of Synchrotron SOLEIL (Desjardins et al, 2020), reporting a sufficient X-ray quantum efficiency and showing the particular interest in this CMOS technology. It has been shown that these sensors dramatically increase the full-frame acquisition speed (48 Hz for the standard gain and 24 Hz for the HDR mode) compared to the commercial Back-Side-Illuminated Charge-Coupled Device (CCD-BSI) routinely used at soft X-ray facilities.…”

Section: Introductionmentioning

confidence: 99%

“…It has been shown that these sensors dramatically increase the full-frame acquisition speed (48 Hz for the standard gain and 24 Hz for the HDR mode) compared to the commercial Back-Side-Illuminated Charge-Coupled Device (CCD-BSI) routinely used at soft X-ray facilities. The first utilization of this device opened up perspectives for soft X-ray ptychography (Mille et al, 2022), soft X-ray scattering techniques (Desjardins et al, 2020;Marras et al, 2021) and other applications, such as soft X-ray fluorescence (Staeck et al, 2021). Another obvious application concerns the implementation of such a class of detectors at ultra-short X-ray sources (laser-based X-ray source or free-electron laser), where the low frame rate of the standard commercially available CCD-BSI (see, for example, Vodungbo et al, 2012;Wang et al, 2012) limits the time of data collection.…”

Section: Introductionmentioning

confidence: 99%

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Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Léveillé¹,

Desjardins²,

Popescu³

et al. 2022

J Synchrotron Radiat

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The latest Complementary Metal Oxide Semiconductor (CMOS) 2D sensors now rival the performance of state-of-the-art photon detectors for optical application, combining a high-frame-rate speed with a wide dynamic range. While the advent of high-repetition-rate hard X-ray free-electron lasers (FELs) has boosted the development of complex large-area fast CCD detectors in the extreme ultraviolet (EUV) and soft X-ray domains, scientists lacked such high-performance 2D detectors, principally due to the very poor efficiency limited by the sensor processing. Recently, a new generation of large back-side-illuminated scientific CMOS sensors (CMOS-BSI) has been developed and commercialized. One of these cost-efficient and competitive sensors, the GSENSE400BSI, has been implemented and characterized, and the proof of concept has been carried out at a synchrotron or laser-based X-ray source. In this article, we explore the feasibility of single-shot ultra-fast experiments at FEL sources operating in the EUV/soft X-ray regime with an AXIS-SXR camera equipped with the GSENSE400BSI-TVISB sensor. We illustrate the detector capabilities by performing a soft X-ray magnetic scattering experiment at the DiProi end-station of the FERMI FEL. These measurements show the possibility of integrating this camera for collecting single-shot images at the 50 Hz operation mode of FERMI with a cropped image size of 700 × 700 pixels. The efficiency of the sensor at a working photon energy of 58 eV and the linearity over the large FEL intensity have been verified. Moreover, on-the-fly time-resolved single-shot X-ray resonant magnetic scattering imaging from prototype Co/Pt multilayer films has been carried out with a time collection gain of 30 compared to the classical start-and-stop acquisition method performed with the conventional CCD-BSI detector available at the end-station.

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Section: Methodsmentioning

confidence: 92%

Section: Cmos Camera Linearity At a Felmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Léveillé¹,

Desjardins²,

Popescu³

et al. 2022

J Synchrotron Radiat

Self Cite

View full text Add to dashboard Cite

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Flexible Soft X‐Ray Image Sensors based on Metal Halide Perovskites With High Quantum Efficiency

Tan,

Liu,

Yang

et al. 2024

Advanced Materials

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Soft X‐ray imaging is a powerful tool to explore the structure of cells, probe material with nanometer resolution, and investigate the energetic phenomena in the universe. Conventional soft X‐ray image sensors are by and large Si‐based charge coupled devices that suffer from low frame rates, complex fabrication processes, mechanical inflexibility, and required cooling below −60 °C. Here, a soft X‐ray photodiode is reported based on low‐cost metal halide perovskite with comparable performance to commercial Si‐based device. Nanothrough network electrode minimized the optical loss due to the shadowing of insensitive layers, while a multidimensional perovskite heterojunction is generated to reduce the photo‐generated carrier loss. This strategy promoted a record quantum efficiency of 8 × 103% without cooling, several orders of magnitude greater than the previously achieved. Flexible and curved soft X‐ray imaging arrays are fabricated based on this high‐performance device structure, demonstrating stable soft X‐ray response and sharp imaging capabilities. This work highlights the low‐cost and efficient perovskite photodiode as a strong candidate for the next‐generation soft X‐ray image sensors.

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Resonant soft X‐ray scattering in polymer science

Collins

Gann

2021

Journal of Polymer Science

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Resonant soft X-ray scattering (RSoXS) is an emerging, powerful technique to probe the nano-to-mesoscale structure of polymers and other molecules. It joins together small-angle X-ray scattering (a statistical nanoprobe) with X-ray spectroscopy that brings with it unique chemical and bond-orientation sensitivity. Through over a decade of discovery and development, RSoXS is moving from a niche technique applied to organic electronic thin films to a mature tool applicable to a plethora of polymeric and molecular systems, encompassing new modalities, analyses, and simulation methods. This development promises to deliver increasingly quantitative answers to challenging questions in polymer science as well as expand its usefulness to complementary fields. This review presents a full synopsis of the technique, including background on the theoretical underpinnings, measurement best practices, and examples of recent RSoXS applications and discoveries provided here to accelerate the transition to a broader range of soft matter and polymeric fields.

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Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography

Cited by 36 publications

References 32 publications

Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Flexible Soft X‐Ray Image Sensors based on Metal Halide Perovskites With High Quantum Efficiency

Resonant soft X‐ray scattering in polymer science

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