Batch microfabrication and testing of a novel silicon-base miniaturized reference electrode with an ion-exchanging nanochannel array for nitrite determination

Abstract

In this paper, a miniaturized Ag/AgCl reference electrode, which can be mass-produced by micro–nano manufacturing technology, was developed and demonstrated to have good stability and a long lifetime.

Review—Recent Advances in Microfabrication, Design and Applications of Amperometric Sensors and Biosensors

“…In miniaturized devices it has been introduced the silver wire/ink pseudoreference electrode, which apparently wins territory due to the formation of the natural oxide layer on the silver wire/ink, eliminating the leaking and solubility issues. In the following chapter, the fabrication process and they applicability of some miniaturized REs 28,29 will be presented.…”

“…Amperometric sensors.-Amperometric microfabricated three electrode systems are a very good alternative for integrated electrochemical device, due to the fact that they are more stable than flexible electrochemical devices, and they are not disposable device like the integrated electrodes from the screen-printed family, where the ink is exfoliating when subjected to a cleaning procedure. In the last decade, electrochemical microfabricated electrodes (Table I) have been intensively used for the determination of heavy-metals, 16,[21][22][23][24][25]27 pollutants, 26,[28][29][30] drugs, 31,32,37 biomolecules, 35,39 oxygen 33 and hydrogen peroxide. 34 In 2010, Chen et al 21 proposed a microfabricated on-chip goldsilver-gold (Au-Ag-Au) three-electrode system for the determination of mercury ions.…”

“…A gold disk electrode was used as the WE for the determination of nitrite by comparing two different REs, a conventional solid-state Ag/AgCl and a miniaturized RE. 28 The silicon-based miniaturized Ag/AgCl RE proposed in this study was designed and batchfabricated using the micro and nano-fabrication technology. The fabrication process involved the use of i) silicon wafer, to pattern a mini-tank for saturated KCl solution storage and a nanochannel area for ion-exchange; and ii) a Pyrex 7720 glass substrate, to define the Ag/AgCl electrode.…”

A high-resolution flexible sensor array based on PZT nanofibers

“…Hence, the array with several sensor units was came up. Currently, although the metal-based and semiconductor-based traditional sensor array can realize the high-density arrangement of signal unit, it has no flexibility and cannot pressure applied on the blind area [37,38]. Thus, the flexible sensor array with high resolution and high sensitivity like real human skin is proposed and researched.…”