2024 IEEE European Solid-State Electronics Research Conference (ESSERC) 2024
DOI: 10.1109/esserc62670.2024.10719442
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BEoL Varactors Based on HfO2/ZrO2 Superlattice for mmWave Applications

Sukhrob Abdulazhanov,
Quang Huy Le,
David Lehninger
et al.
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