2016
DOI: 10.1109/jmems.2016.2533427
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Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure

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Cited by 7 publications
(5 citation statements)
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“…where f ∆ is the measurement bandwidth, which is typically about 30 Hz for a CCD detector; Q the resonance quality factor, which is the ratio of the vibration amplitude at resonant frequency to that at off-resonant frequency; and Q is typically about 10 at atmospheric pressure, and 100-1000 in vacuum (Q 500 = for our calculation). g and 0 w are the cantilever's spring constant and the system resonant frequency respectively, which can be obtained by simulating [14]. Using the thermomechanical sensitivity of the cantilever, thermomechanical noise can be converted to an equivalent temperature fluctuation as:…”
Section: Vibration Noisementioning
confidence: 99%
See 1 more Smart Citation
“…where f ∆ is the measurement bandwidth, which is typically about 30 Hz for a CCD detector; Q the resonance quality factor, which is the ratio of the vibration amplitude at resonant frequency to that at off-resonant frequency; and Q is typically about 10 at atmospheric pressure, and 100-1000 in vacuum (Q 500 = for our calculation). g and 0 w are the cantilever's spring constant and the system resonant frequency respectively, which can be obtained by simulating [14]. Using the thermomechanical sensitivity of the cantilever, thermomechanical noise can be converted to an equivalent temperature fluctuation as:…”
Section: Vibration Noisementioning
confidence: 99%
“…Compared with photon IR detectors, uncooled IR detectors are more widely used in the non-military field for their ability to work at ambient temperature, which brings lower cost and power consumption. Furthermore, among various types of uncooled detectors, the optomechanical detectors based on the thermal response of bi-material micro-cantilever have been researched a lot [11,12] and shown significant potentials [13][14][15][16] for their simple fabricating, cost-reducing, and more importantly, readout integrated circuits(ROIC) removing [10]. So that the parasitic heat from ROIC is eliminated and there is no thermal leakage path caused by the electrical contacts between pixels and substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, in line with standardization studies, Carranza et al showed standard 180 nm complementary metal-oxide-semiconductor (CMOS) compatible metamaterial coupled with VOx and Si pn diode for security imaging devices 20 . In all these previous studies, despite the system complexity, the sensing pixels generally use single and narrowband metamaterial response which limits the sensing capacity 15,18,[21][22][23] .…”
Section: Fractal Interwoven Resonator Based Penta-band Metamaterials ...mentioning
confidence: 99%
“…The proposed fractal metamaterial absorber can be used as a sensing platform for real time optomechanical uncooled imaging 21,23,25,26 . We present an FMMA based sensing pixel design for bimaterial microcantilever focal plane array (FPA) imaging systems.…”
Section: Designmentioning
confidence: 99%
“…Infrared (IR) imaging is used extensively for military and civilian purposes. Terahertz (THz) imaging has also received a lot of attention recently because of its attractive features such as being harmless and capable of penetrating through fabric [1][2][3][4][5][6][7][8]. Compared to microbolometers, microcantilever focal plane arrays (MFPAs) offer a more sensitive and cheaper solution to far IR [9][10][11][12][13][14][15] and THz [1,16] imaging.…”
Section: Introductionmentioning
confidence: 99%