2023
DOI: 10.1039/d3me00126a
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Bio-inspired dry adhesive pads using multi-walled carbon nanotube/polydimethylsiloxane composites for efficient wafer transfer robot arms in smart factories

Bom Lee,
Young Chun Ko,
Simon Kim
et al.

Abstract: The development of dry adhesive pads (DAPs) is essential to prevent wafer detachment from high-speed wafer-transfer robot arms. However, polydimethylsiloxane (PDMS)-based DAPs, which are insulating elastomers, generate residual charges inside...

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“…The shape of CNTs could allow them to become entangled; alternatively, functionalized nanotubes could react with surfaces with their strength making them strongly adherent. For example, CNT were used to reinforce PDMS dry adhesive pads; 99 the CNT improve the stability of the pads and diffuse concentration of charge at the PDMS surface which leads to surface deformation and loss of conformity. Alternatively, a poly(ethyleneimine), CNT and epoxy resin material was used as an adhesive.…”
Section: Applications Of Carbon Nanotubesmentioning
confidence: 99%
“…The shape of CNTs could allow them to become entangled; alternatively, functionalized nanotubes could react with surfaces with their strength making them strongly adherent. For example, CNT were used to reinforce PDMS dry adhesive pads; 99 the CNT improve the stability of the pads and diffuse concentration of charge at the PDMS surface which leads to surface deformation and loss of conformity. Alternatively, a poly(ethyleneimine), CNT and epoxy resin material was used as an adhesive.…”
Section: Applications Of Carbon Nanotubesmentioning
confidence: 99%
“…The shape of CNTs could allow them to become entangled; alternatively, functionalized nanotubes could react with surfaces with their strength making them strongly adherent. For example, CNTs were used to reinforce PDMS dry adhesive pads; the CNTs improve the stability of the pads and diffuse concentration of charge at the PDMS surface which leads to surface deformation and loss of conformity. Alternatively, a poly(ethylenimine), CNT and epoxy resin material was used as an adhesive .…”
Section: Applications Of Carbon Nanotubesmentioning
confidence: 99%