Bohm criterion in magnetron plasma

Szikora, Bela

doi:10.1016/s0042-207x(01)00150-6

Cited by 5 publications

(3 citation statements)

References 7 publications

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“…In 2001 VALSAQUE [17] conducted a systematic numerical study for several sheath models, one of which was a magnetized sheath neglecting collision and ionization. Also in 2001, SZIKORA [18] characterized a DC planar magnetron discharge measured by Langmuir probe. Furthermore the Bohm's theory was proved to be valid.…”

Section: Introductionmentioning

confidence: 99%

Bohm Criterion in a Magnetized Plasma Sheath

Yan-Kun¹,

Xiu²,

Liu³

et al. 2011

Plasma Sci. Technol.

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Section: Introductionmentioning

confidence: 99%

Bohm Criterion in a Magnetized Plasma Sheath

Yan-Kun¹,

Xiu²,

Liu³

et al. 2011

Plasma Sci. Technol.

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“…As an important criterion for the stability of the sheath, as early as 2001, Szikora [53] verified the correctness of the Bohm criterion theory through experiments by using Langmuir probe measurement. Researchers generally use the Sagdeev potential method to determine the Bohm criterion of the sheath [11,12,35,54].…”

Section: The Extended Form Of the Bohm Criterionmentioning

confidence: 90%

Properties of collisional plasma sheath with ionization source term and two-temperature electrons in an oblique magnetic field

Chen,

An,

Tan

et al. 2024

J. Phys. D: Appl. Phys.

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A collisional magnetized plasma sheath with two groups of electrons has been studied using a fluid model including the effects of the ionization source term and the collisional force between ions and neutral atoms. Two kinds of non-Maxwellian descriptions of electron velocity distribution, non-extensive distribution and truncated distribution, are applied in the model, and the ionization effects of both kinds are considered. By applying Sagdeev potential, the modified Bohm sheath criterion is derived. The effects of ionization, magnetic field, and high-temperature electron concentration ratio on plasma sheath density, potential, sheath thickness, and ion kinetic energy are studied. In cases with high background gas density, ion density accumulates at the sheath edge position, forming a peak and manifesting as a rapid drop in the potential profile. The distribution characteristics of electrons have a significant impact on the transport properties of ions. Oscillations and non-monotonic characteristics of net charge near the sheath edge occur as the magnetic field angle increases, leading to an increase in the sheath layer width. It can be seen that in the case of a collisional sheath structure with high-temperature electrons, it is essential to consider the sheath changes induced by the ionization and the collisional force. Compared to a symmetric electron velocity distribution, the actual thickness of the sheath layer in a truncated electron distribution assumption could be significantly reduced.

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“…In 2001, several sheaths were systematically studied. [22] The Bohm theory is further proved valid by Szikora [23] in experiment. In 2010, we investigated the Bohm criterion in a magnetized plasma sheath taking account of collision, and presented the effects of an external magnetic field on the Bohm criterion.…”

mentioning

confidence: 97%

Sheath Criterion for a Collisional Electronegative Plasma Sheath in an Applied Magnetic Field

Xiu¹,

Liu²,

Qiu³

et al. 2011

Chinese Phys. Lett.

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The sheath criterion for a collisional electronegative plasma sheath in an applied magnetic field is investigated. It is assumed that the system consists of hot electrons, hot negative ions and cold positive ions. The effect of an applied magnetic field on the sheath criterion is discussed. The results reveal that the magnetic field has effects on both the upper and lower limits, which cause the range of the ion Mach number to increase. In addition, the numerical calculations of the electronegative plasma sheath are carried out to demonstrate the effects of sheath criterion on the characteristics of the sheath.

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Bohm criterion in magnetron plasma

Cited by 5 publications

References 7 publications

Bohm Criterion in a Magnetized Plasma Sheath

Bohm Criterion in a Magnetized Plasma Sheath

Properties of collisional plasma sheath with ionization source term and two-temperature electrons in an oblique magnetic field

Sheath Criterion for a Collisional Electronegative Plasma Sheath in an Applied Magnetic Field

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