Broad Range and High Precision Self-Mixing Interferometer Based on Spectral Analysis With Multiple Reflections

Zhang, Yanting; Wang, Rui; Wang, Zheng; Wang, Xiulin; Xu, Hui; Sun, Huifang

doi:10.1109/jsen.2018.2879506

Cited by 13 publications

(2 citation statements)

References 21 publications

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“…With the development of advanced manufacturing, biomedicine, and many other leading-edge fields, the requirement for micro motion measurement at the nanometer level is increasing [1][2][3][4][5]. As a new interferometry technology, SMI has been widely used in the field of precision measurement.…”

Section: Introductionmentioning

confidence: 99%

High-Precision Laser Self-Mixing Displacement Sensor Based on Orthogonal Signal Phase Multiplication Technique

et al. 2023

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A new signal processing method named orthogonal signal phase multiplication (OSPM) is proposed, which is used to improve the precision of vibration measurement in a phase-modulating self-mixing interferometer (SMI). The modulated signal is acquired by an electro-optic modulator, which is placed in the external cavity. Higher measurement precision is realized by performing the phase multiplication algorithm on the orthogonal signals extracted from the harmonic components of the signal spectrum. Theoretically, the displacement reconstruction precision of OSPM is higher than that of conventional modulation methods, and it can be continuously improved by increasing the multiplication times. The feasibility and performance of the proposed method are verified by simulated signals and confirmed by experiments; the absolute error is less than 11 nm, and relative error is less than 0.75%, within the amplitude range from 661 nm to 2013 nm. This method does not involve additional optical elements, and its effectiveness meet the requirements for real-time high-precision measurements.

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Section: Introductionmentioning

confidence: 99%

High-Precision Laser Self-Mixing Displacement Sensor Based on Orthogonal Signal Phase Multiplication Technique

et al. 2023

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“…However, due to the limitation of diffraction efficiency, it is impossible to achieve a higher number of diffraction times. In 2019, Zhang et al [19] proposed a self-mixing interferometer based on the multiple reflection technique with spectral analysis for nanoscale vibration measurement, which effectively broadens the minimum measurable amplitude by increasing the number of reflections. In 2020, Lu et al [20] proposed a novel reflective phase-modulation (RPM) method.…”

Section: Introductionmentioning

confidence: 99%

Laser Self-Mixing Interferometer Based on Multiple Reflections and Phase-Modulation Technique

Wang

Zhu

et al. 2022

Photonics

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An improved method combining multiple reflections with the phase-modulation technique (MR-PM) is proposed to construct a self-mixing interferometer with high accuracy. The phase modulation is performed by using an electro-optic modulator that is placed in the external cavity. To broaden the harmonic components spectrum of the self-mixing signal, the multiple-reflection technique is employed. By extracting orthogonal signals from the spectrum, phase demodulation is implemented to realize displacement reconstruction. The principle and signal processing approach are described in detail. A series of simulations and experiments indicate that the measurement accuracy of the system can be effectively improved with the increase in reflection times. The vibration with an amplitude of 44 nm has been proved to be measurable with a reconstruction error less than 3 nm. Due to the advantages of high accuracy and broad measurement range, the proposed method will play a significant role in the field of non-contact nanometer vibration measurement.

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Design and experimental study of the biorthogonal linkage laser self-mixing angle sensor

Zhao

Guo

Wang

et al. 2020

Optics Communications

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Broad Range and High Precision Self-Mixing Interferometer Based on Spectral Analysis With Multiple Reflections

Cited by 13 publications

References 21 publications

High-Precision Laser Self-Mixing Displacement Sensor Based on Orthogonal Signal Phase Multiplication Technique

High-Precision Laser Self-Mixing Displacement Sensor Based on Orthogonal Signal Phase Multiplication Technique

Laser Self-Mixing Interferometer Based on Multiple Reflections and Phase-Modulation Technique

Design and experimental study of the biorthogonal linkage laser self-mixing angle sensor

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