Broadband x-ray ptychography

Abstract

Abstract. The Born modal expansion of the cross-spectral density is used to construct a ptychographic imaging scheme appropriate for X-ray imaging using broadband partially coherent sources. The formulation of the scheme is demonstrated through a comparison with earlier work using detailed simulations. The advantages of the broadband ptychographic imaging approach are discussed in the context of the determination of the nanoroughness and thickness profile of thin films.