Abstract:CSO I amorphous carbon (a-C) superlattice structures were fabricated by shutter controlled molecular beam deposition. A-C layers were transformed from CW by nitrogen ion bombardment. The dark and photo conductivity of Csda-C superlattice structures were measured by gapcell structure. The resulted films show high resistivity, and the photosensitivity ratio is ranged 9-16. It is thought that such low ypotosensitivity is caused by high defect density of 2.7~10 cm3 in the a-C layers.Use of hydrogen plasma in Ceo a… Show more
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