Calibration test method of capacitance sensor for multiple degrees of freedom based on inertial sensor
DongXu LIU,
ShaoXin WANG,
KeQi QI
et al.
Abstract:A capacitive sensor is a key component of high-precision displacement detection in space missions. However, due to the influence of sensitive structural manufacturing errors and electronics device precision, theoretical and actual system circuit gains often differ. Herein, as the core of the capacitive sensing circuit, the theoretical model of the differential amplifier circuit is analyzed. Considerably, a model of gain and zero bias of the circuit is proposed. Meanwhile, a corresponding modulation calibration… Show more
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