Cantilever Resonator With Integrated Actuation and Sensing Fabricated Using a Single Step Lithography

Bulk disc resonators radial and wineglass mode resonance characterization for mass sensing applications

“…Their small form factor and ability of integration into conventional integrated circuit technology makes them attractive devices in different areas (Baghelani et al 2013;Cagliani1 and Davis 2011;Liu and Hossein-Zadeh 2013;Hwang et al 2012;Mohanasundaram et al 2013;Wu et al 2012;Zargarpour and Zarifi 2014;Nguyen 2007). Sensors have a wide range of applications from chemical, environmental, to medical and military fields.…”