Caractérisation Spectroscopique des Couches Minces du SnO2 non Dopées et Dopées Fluore Elaborées Par Spray Ultrasonique

Abstract

In this work, undoped and doped thin oxide films with fluorine (F: SnO 2) were prepared by spray ultrasonic technique on ordinary glass substrates heated to 480 ° C, using as precursor SnCl 4 dissolved in methanol. The UV-Visible spectrum was employed to investigate optical characteristics of the films (transmittance, optical gap and refraction index) before and after doping. To evaluate growth velocity of the films the thickness of films was calculated using the Manifacier and Swanepoel method. UV-Visible spectrum reveal that the prepared SnO 2 films have a good transmittance laying between 74-85% in visible region and have an optical gap between 3.87 to 4 eV. We have noticed that growth velocity decreases with increasing doping level from 300nm/min for the doped films at 3% to 220nm/min for the doped ones at 6%.