“…4c shows the N1s XPS spectra of CrSiCN coatings. It is clear that the N1s spectra of CrCN coatings mainly exhibited three peaks of 396.5 eV, 397.7 eV and 399.1 eV, which were corresponded to Cr-N(CrN) [41,57], Cr-N(Cr 2 N) [17,57,59] and N-C bond [17,57,58], respectively. After silicon atoms were doped into the CrCN coatings (TMS ≤ 15 sccm), the peaks located at 397.7-397.9 eV were corresponded to Si-N/Cr-N(Cr 2 N) bond [17,41,[56][57][58].…”