2009
DOI: 10.1016/j.solidstatesciences.2009.02.029
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Carbon based Si- and Cr-containing thin films: Chemical and nanomechanical properties

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Cited by 13 publications
(6 citation statements)
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“…3. Obviously, the main peak of all the CrSiCN coatings could be deconvoluted into two overlapped peaks related to Si-C bond around 101.1 eV and Si-N bond around 101.8 eV [24,[39][40][41]. Moreover, the volume fraction of Si-N bond increases with increasing Si concentration, and finally a novel and weak Si-Si bond presents at 99.2 eV due to higher Si incorporation in CrSiCN (30) …”
Section: Element Concentration and Phase Condition Of Coatingsmentioning
confidence: 99%
“…3. Obviously, the main peak of all the CrSiCN coatings could be deconvoluted into two overlapped peaks related to Si-C bond around 101.1 eV and Si-N bond around 101.8 eV [24,[39][40][41]. Moreover, the volume fraction of Si-N bond increases with increasing Si concentration, and finally a novel and weak Si-Si bond presents at 99.2 eV due to higher Si incorporation in CrSiCN (30) …”
Section: Element Concentration and Phase Condition Of Coatingsmentioning
confidence: 99%
“…4d), which was attributed to Cr-C, sp 2 C-N/sp 2 C-C, sp 3 C-N/sp 3 C-C and C-O bonds [17,41]. After doping the silicon atoms into the CrCN coatings, the first peak shifted and located at 282.2-283 eV, which was attributed to C-Cr/C-Si bond [58,59]. When the TMS increased from 15 sccm to 25 sccm, the third peak shifted to high energy and located at 286.1-286.3 eV, which was attributed to sp 3 C-N/C-N bond [17,50].…”
Section: Resultsmentioning
confidence: 99%
“…4c shows the N1s XPS spectra of CrSiCN coatings. It is clear that the N1s spectra of CrCN coatings mainly exhibited three peaks of 396.5 eV, 397.7 eV and 399.1 eV, which were corresponded to Cr-N(CrN) [41,57], Cr-N(Cr 2 N) [17,57,59] and N-C bond [17,57,58], respectively. After silicon atoms were doped into the CrCN coatings (TMS ≤ 15 sccm), the peaks located at 397.7-397.9 eV were corresponded to Si-N/Cr-N(Cr 2 N) bond [17,41,[56][57][58].…”
Section: Resultsmentioning
confidence: 99%
“…23 Other bands at 285.9, 286.7, 288.1, and 288.8 eV are assigned to C−N, C�N, C−O, and C�O bonds, respectively. 24,25 Among all samples, Cr 2 (NCN) 3 -MN shows an extremely strong band of C�N but very weak bands of C−O and C�O, implying the highest (N�C�N) 2− content with low impurities. The band near 283.8 eV indicates the interaction between Cr 2 (NCN) 3 and N-doped carbon.…”
Section: mentioning
confidence: 99%