Carbon stripper foils held in place with carbon fibers

Lifetime dependence of nitrided carbon stripper foils on sputter angle during N+ ion beam sputtering

“…However, as can be seen from Fig. 3(b)-(g), the thickness of every NCS foil decreased rapidly to (5)(6)(7)(8)(9) lg/cm 2 at approximately (2.0-3.0) C/cm 2 , depending on the initial thickness. Subsequently, all NCS foils exhibited a near-constant thickness of 7-8 lg/cm 2 .…”

“…In order to overcome this problem, the development of long-life carbon stripper foils with thicknesses less than 30 lg/cm 2 is very important. Therefore, new foil preparation methods are being investigated all over the world [1][2][3][4][5]. Ion-beam sputtering is not a suitable method for fabricating such foils, because the sputtering yield of this technique is low.…”