Abstract:Observations of the crystallographic structural changes of deposited Ti films (100 nm thick) during Cimplantation were made by using transmission electron microscope (TEM) for the purpose to elucidate the carbonizing processes of Ti films. The Ti films were deposited by an electron beam heating method onto thermally cleaned NaCl (001) surfaces held at room temperature (RT). Both the 200 kV conventional TEM and the 400 kV analytical high resolution TEM combined with ion accelerators were used. The deposited Ti … Show more
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