Cellular Automation Model of Phase Separation during Annealing of Non–Soichiometric Silicon Oxide Layers

Красников, Г. Я.; Зайцев, Н. А.; Матюшкин, И. В.; Korobov, Sergey V.

doi:10.17073/1609-3577-2014-2-109-115

Izv. vysš. učebn. zaved., Mater. èlektron. teh.

2015

DOI: 10.17073/1609-3577-2014-2-109-115

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Cellular Automation Model of Phase Separation during Annealing of Non–Soichiometric Silicon Oxide Layers

Г. Я. Красников¹,

Н. А. Зайцев²,

И. В. Матюшкин³

et al.

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Cellular Automation Model of Phase Separation during Annealing of Non–Soichiometric Silicon Oxide Layers

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