1996
DOI: 10.1016/0925-4005(96)80017-7
|View full text |Cite
|
Sign up to set email alerts
|

Ceramic thin films by sol-gel processing as novel materials for integrated humidity sensors

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
56
0

Year Published

1997
1997
2018
2018

Publication Types

Select...
5
2

Relationship

1
6

Authors

Journals

citations
Cited by 146 publications
(56 citation statements)
references
References 34 publications
0
56
0
Order By: Relevance
“…Such a high humidity sensitivity has been reported for sol-gel-processed dense films, based on alkalidoped titania and on magnetite. 26 For alkali-doped titania films, a novel sensing mechanism has been proposed, with the direct participation of alkali ions. 28 For magnetite films, the high sensitivity may be due to the simultaneous presence of Fe +2 and Fe +3 ions in the materials, with charge jumping between these ions, enhanced by humidity.…”
Section: Humidity-sensitive Electrical Properties Of Cdtio 3 Filmsmentioning
confidence: 99%
“…Such a high humidity sensitivity has been reported for sol-gel-processed dense films, based on alkalidoped titania and on magnetite. 26 For alkali-doped titania films, a novel sensing mechanism has been proposed, with the direct participation of alkali ions. 28 For magnetite films, the high sensitivity may be due to the simultaneous presence of Fe +2 and Fe +3 ions in the materials, with charge jumping between these ions, enhanced by humidity.…”
Section: Humidity-sensitive Electrical Properties Of Cdtio 3 Filmsmentioning
confidence: 99%
“…ZrO 2 is an important functional material. The ZrO 2 film deposited on metal surfaces has been extensively used in the fields of corrosion protection, [12] catalytic films, [13] sensor films, [14] and transparent, conducting films. [15] Recently, much research has been focused on the synthesis of ordered, porous zirconia by using a surfactant, such as cetyltrimethylammonium bromide, as the structure-directing template agent.…”
mentioning
confidence: 99%
“…The importance of humidity sensing has been well understood and many researchers have been focussed on the development of humidity sensitive materials [12][13][14][15][16]. Most humidity detection studies have investigated on the use of polymer [17][18][19][20][21][22] and ceramic materials due to their low cost and excellent performance [23][24][25][26][27]. The aim of the present study has been to seek a material that possesses good sensitivity over the entire range of humidity and should be stable over time.…”
Section: Introductionmentioning
confidence: 99%