Characteristics and reliabilities on the Dicing before Grinding (DBG) process in nMOSFETs

Kao, Hsuan‐Ling; Yeh, Chih-Sheng; Chen, Min‐Te; Chiu, Hsien‐Chin; Chang, Li-Chun

doi:10.1016/j.sse.2012.07.012

Solid-State Electronics

2013

DOI: 10.1016/j.sse.2012.07.012

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Characteristics and reliabilities on the Dicing before Grinding (DBG) process in nMOSFETs

Hsuan‐Ling Kao

Chih-Sheng Yeh

Min‐Te Chen

et al.

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Characteristics and reliabilities on the Dicing before Grinding (DBG) process in nMOSFETs

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References 22 publications

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