Characterization of a quarter torus filter for vacuum arc ion flux transmission

Abstract

Measurements on the ion flux transmission in a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with water-cooled electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. It is employed a Copper cathode (6 cm in diameter) with a Copper annular anode. The filter consists in a steel cylinder 500 mm length and 100 mm inner diameter with 90 o of bending angle and corrugated lateral walls, surrounded by a magnetic field generating coil. The arc is operated at a current level of 100 A, and the intensity of the filtering magnetic field was in the range 0−200 G (measured at the knee of the filter). This magnetic field is enough high so as to magnetize the electrons but not the ions. The discharge is ignited by bringing (and later removing) a tungsten striker into contact with the cathode. The arc voltage drop, the floating potentials of the filter and the plasma, and the ion current collected by probes located at different positions as functions of the magnetic field intensity are reported and compared with measurements presented in the literature with other similar devices.

Three-dimensional Ion Distribution in a Filtered Vacuum Arc Discharge

“…In a previous work, the magnetic filter was The cathodic vacuum arc is widely used to characterized along its axis, by using only a single probe [7]. In this work we present preliminary produce coatings [1].…”