Characterization of molybdenum/silicon X-ray multilayers

Physico‐chemical study of the interfaces of Mo/Si multilayer interferential mirrors: correlation with the optical properties

“…10 In the literature, the crossing through the percolation threshold is usually associated with a decrease of the root mean square (rms) roughness. 11 To complete this study, it would be interesting to perform diffuse non-specular scattering and atomic force microscopy measurements in order to measure the roughness accurately.…”