Characterization of solid tin target for gas discharges produced EUV plasmas

Abstract

Abstrucr-In the development of our Zpinch plasma EUV source, xenon (Xe) is used for the background gas discharges, and a solid tin (Sn) rod is used as target material due to its potential of high convention efficiency (CE) from input electric energy to EUV radiation I1,Zj. The Zpinch plasma was driven by pulsed current with amplitude of 30 kA and pulse duration of 110 ns. Pinhole imaging, EUV spectrograph and in-band EUV energy monitor were used to characterize the EUV emission from the Zpinch discharge. The experimental analyses have demonstrated the CE was as high as 3% ~31.