Characterizing Thin Films in the Flat Panel Display Industry with Variable Angle Spectroscopic Ellipsometry (VASE®)

Abstract

Variable Angle Spectroscopic Ellipsometry (VASE ® ) is a common characterization method for thin films used in the flat panel display industry. It is a precise and non-destructive technique for determining refractive index and film thickness for single or multi-layered films. The film properties can be mapped to ensure uniformity over large area panels. The application of VASE ® for flat panel applications will be reviewed -including measurements of amorphous silicon, silicon nitride, silicon dioxide, liquid crystals, indium tin oxide (ITO), and multi-layers of these materials.