Chemical machining of Zerodur material with atmospheric pressure plasma jet

Yao, Ying Xue; Wang, B.; Wang, J.H.; Jin, Haoyu; Zhang, Y.F.; Dong, Shen

doi:10.1016/j.cirp.2010.03.118

Cited by 32 publications

(13 citation statements)

References 9 publications

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“…Yao et al and Jin et al presented plasma machining of Zerodur using a RF-excited plasma jet at atmospheric pressure. It was shown that the surface roughness was strongly dependent on the process parameters and in particular on the mixing ratio of the working gas, SF 6 and O 2 [6,7]. However, such plasma figuring methods can provoke surface roughening due to inhomogeneous etching, an effect which was also observed in the case of reactive ion etching (RIE) of pyrex glass [8].…”

Section: Introductionmentioning

confidence: 92%

Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure

Gerhard

Weihs

Luca

et al. 2013

J. Eur. Opt. Soc.-Rapid Publ.

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In this paper, surface smoothing of optical glasses, glass ceramic and sapphire using a low-power dielectric barrier discharge inert gas plasma at atmospheric pressure is presented. For this low temperature treatment method, no vacuum devices or chemicals are required. It is shown that by such plasma treatment the micro roughness and waviness of the investigated polished surfaces were significantly decreased, resulting in a decrease in surface scattering. Further, plasma polishing of lapped fused silica is introduced. Based on simulation results, a plasma physical process is suggested to be the underlying mechanism for initialising the observed smoothing effect.

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Section: Introductionmentioning

confidence: 92%

Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure

Gerhard

Weihs

Luca

et al. 2013

J. Eur. Opt. Soc.-Rapid Publ.

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“…Stress absence on workpiece; tool and capital costs are low; weight is reduced near complex contours Chemical's handling and disposal; difficult to process porous materials; surface defects; cuts are shallow [3,4] Plasma Machining Material is machined by using ionized gas at high temperatures. This results in good surface finish and small kerf widths.…”

Section: Introductionmentioning

confidence: 99%

Understanding Material Removal Mechanism and Effects of Machining Parameters during EDM of Zirconia-Toughened Alumina Ceramic

et al. 2021

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Non-conductive structural ceramics are receiving ever-increasing attention due to their outstanding physical and mechanical properties and their critical applications in aerospace and biomedical industries. However, conventional mechanical machining seems infeasible for the machining of these superior ceramics due to their extreme brittleness and higher hardness. Electro discharge machining (EDM), well known for its machining of electrically conductive materials irrespective of materials hardness, has emerged as a potential machining technique due to its noncontact nature when complemented with an assistive electrode technique. This paper investigates the material removal mechanism and effects of machining parameters on machining speed and dimensional and profile accuracies of features machined on zirconia toughened alumina (ZTA) ceramics using assistive electrode EDM. Our experimental results demonstrate that both increasing peak current and pulse on time improves the MRR, however, it also aids in generating thicker layer on machined surface. In addition, pulse interval time is crucial for the machining of nonconductive ceramics, as larger value might cause the complete removal of intrinsic carbon layer which may lead to non/sparking condition. Higher peak current increases circularity whereas short pulse on and pulse off time aid in increasing circularity due to rough machining. In addition, taperness is found to be regulated by the peak current and pulse on time. Overall, thermal cracking and spalling appear to be a dominating material removal mechanism other than melting and evaporation for the EDM of ZTA.

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“…The percentage error between the values of the cut-width was calculated using Equation (10). The expected value from Equation (9) was calculated as 349.6 µm, and the experimental value (actual value) measured was 330 µm (Figure 10).…”

Section: Examination Of the Predicted Model Forwire-edm Oncomplex-shaped Pcm Partsmentioning

confidence: 99%

Analysis of Wire-Cut Electro Discharge Machining of Polymer Composite Materials

et al. 2021

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This study presents the analysis of wire-cut electro-discharge machining (WIRE-EDM) of polymer composite material (PCM). The conductivity of the workpiece is improved by using 1 mm thick titanium plates (layers) sandwiched on the PCM. Input process parameters selected are variable voltage (50–100 V), pulse duration (5–15 μs), and pause time (10–50 μs), while the cut-width (kerf) is recognized as an output parameter. Experimentation was carried out by following the central composition design (CCD) design matrix. Analysis of variance was applied to investigate the effect of process parameters on the cut-width of the PCM parts and develop the theoretical model. The results demonstrated that voltage and pulse duration significantly affect the cut-width accuracy of PCM. Furthermore, the theoretical model of machining is developed and illustrates the efficacy within the acceptable range. Finally, it is concluded that the model is an excellent way to successfully estimate the correction factors to machine complex-shaped PCM parts.

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Chemical machining of Zerodur material with atmospheric pressure plasma jet

Cited by 32 publications

References 9 publications

Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure

Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure

Understanding Material Removal Mechanism and Effects of Machining Parameters during EDM of Zirconia-Toughened Alumina Ceramic

Analysis of Wire-Cut Electro Discharge Machining of Polymer Composite Materials

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