Chemischer Informationsdienst
 1986
DOI: 10.1002/chin.198642329
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ChemInform Abstract: Focused Lamp Zone Melting Recrystallization of Silicon on Insulating Substrates.

J. Sakurai1

Abstract: A new zone melting recrystallization (ZMR) technique for poly‐Si films on insulators has been developed using a pair of focused long tungsten lamps without keeping the entire wafer at the high temperature.

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