ChemInform
 1987
DOI: 10.1002/chin.198703035
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ChemInform Abstract: Isotope‐Selective IR Multiple Photon Decomposition of Hexafluorodisilane.

M. Kamioka1,
Yoichi Ishikawa2,
Hayato Kaetsu3
et al.

Abstract: The irradiation of Si2F6 with CO2 TEA laser pulses induces highly efficient decomposition yielding SiF4 as the main product, traces of Si3F8 and a whitish film.

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