Ultrathin, uniform, pinhole-free solid polymer electrolyte films of approximately 1 ~m thickness were prepared by the complexation of plasma-polymerized tris(2-methoxyethoxy)vinylsilane (TMVS) with LiC104. The results of FT-IR, 1H NMR, and ~3C NMR measurements indicate that the structure of the plasma polymer is~very similar to poly(TMVS), except for the presence of a small amount of what is probably a cyclic group impurity. The glass transition temperature and ionic conductivity of the solid polymer electrolyte depend on the LiC104 content, and the variation of the ionic conductivity with temperature can be described exactly by using a WLF type of equation. Room temperature conductivities greater than 10 -6 S cm-' (102 ~1 cm 2 resistance per unit area) were observed.) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 128.122.253.212 Downloaded on 2015-06-24 to IP