2023
DOI: 10.1116/6.0002795
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Coaxial ion source: Pressure dependence of gas flow and field ion emission

Abstract: We investigated the pressure dependence of the gas flow and the field ion intensity of a coaxial ion source operating at room temperature over a wide pressure range, testing various gases and ionization voltages. Flow conductance measurements taking into account the different gases’ viscosity and molecular mass consistently exhibit a generic pattern. Three different flow regimes appear with increasing upstream pressure. Since the coaxial ion source supplies the gas locally, very near the apex of the tip where … Show more

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