Cold plasma chemistry and diagnostics

Tanarro, Isabel; Herrero, Vı́ctor J.; Carrasco, Esther; Jiménez-Redondo, Miguel

doi:10.1016/j.vacuum.2010.12.027

Cited by 23 publications

(9 citation statements)

References 59 publications

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“…Cold plasmas provide very reactive media at room temperature. Fast electrons, with energies in the tens of eV, break the molecules and lead to the production of reactive ions and radicals that can initiate a complex chemistry both in the gas phase and at the vessel walls (Tanarro et al 2011). They have been used at the IEM group for the study of species of astrophysical interest (e.g.…”

Section: Cold Plasmasmentioning

confidence: 99%

Broad-band high-resolution rotational spectroscopy for laboratory astrophysics

Cernicharo

Gallego

López-Pérez

et al. 2019

A&A

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We present a new experimental setup devoted to the study of gas phase molecules and processes using broad band high spectral resolution rotational spectroscopy. A reactor chamber has been equipped with radio receivers similar to those used by radio astronomers to search for molecular emission in space. The whole Q (31.5-50 GHz) and W bands (72-116.5 GHz) are available for rotational spectroscopy observations. The receivers are equipped with 16×2.5 GHz Fast Fourier Transform spectrometers with a spectral resolution of 38.14 kHz allowing the simultaneous observation of the complete Q band and one third of the W band. The whole W band can be observed in three settings in which the Q band is always observed. Species such as CH3CN, OCS, and SO2 are detected, together with many of their isotopologues and vibrationally excited states, in very short observing times. The system permits automatic overnight observations and integration times as long as 2.4×105 seconds have been reached. The chamber is equipped with a radiofrequency source to produce cold plasmas and with four ultraviolet lamps to study photochemical processes. Plasmas of CH4, N2, CH3CN, NH3, O2, and H2, among other species, have been generated and the molecular products easily identified by their rotational spectrum, and mass spectrometry and optical spectroscopy. Finally, the rotational spectrum of the lowest energy conformer of CH3CH2NHCHO (N-Ethylformamide), a molecule previously characterized in microwave rotational spectroscopy, has been measured up to 116.5 GHz allowing the accurate determination of its rotational and distortion constants and its search in space.

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Section: Cold Plasmasmentioning

confidence: 99%

Broad-band high-resolution rotational spectroscopy for laboratory astrophysics

Cernicharo

Gallego

López-Pérez

et al. 2019

A&A

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“…The non‐interfering in situ diagnostics and monitoring of plasmas, plasma‐assisted processes, and parameters are of fundamental importance, since these provide indispensable feedback for tuning and real‐time control, in order to achieve a desired output or product . Plasma‐assisted/enabled processing consists of plasma‐generating setups and technological solutions that are used to direct the plasma itself, plasma (by)products and energy fluxes.…”

Section: Challenges In Plasma Sciencementioning

confidence: 99%

White paper on the future of plasma science for optics and glass

Šimek

Černák

Kylián

et al. 2018

Plasma Processes & Polymers

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This paper reflects on the future of low-temperature plasma science in relation to the manufacturing and novel uses of glass. The text summarizes the current state of the art on the major topics discussed, such as glass processing, optics and photonics, healthcare issues, building and fenestration applications. It also identifies several challenges that are driven by applications, and which are compatible with roadmaps for their respective industries. The frontiers of plasma science are discussed, for example, in relation to the use of plasmas as an active optical element in fast-response adaptive optics systems, optical metamaterials, and the development of next-generation nanolithography. Future demand for the successful implementation of plasma-based technologies in the glass, optics, and photonic industries will depend on further progress in plasma science. Hence, some needs and recommendations concerning both fundamental and applied plasma research are summarized.

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“…Elektron sıcaklığı, termodinamik olarak dengede olmayan plazmanın iyonlaşmasını ve kimyasal süreçleri belirlemede kullanılabilir. Gaz sıcaklığı ve ısıl süreçler ise iyonizasyon ve kimyasal reaksiyonları etkilemez [6][7][8][9]. Etkileşim mekanizmaları düşük basınç plazmada elektronik çarpışmalar kullanılarak kontrol edilemeyebilir.…”

Section: Introductionunclassified

The Properties of Inductive Coupled Radio-Frequency Neon Flowing Discharge at Low-Pressure

Şahi̇n¹

2019

Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi

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Özet: İndüktif olarak bağlı radyo-frekans (RF) deşarj odasında 0,17 mbar ile 1,4 mbar arasındaki basınçlarda bulunan neon (Ne) deşarjını karakterize etmek için optik emisyon spektrumları kullanılmıştır. 13,56 MHz frekansında 100, 160 ve 200 W çıkış güçlerinde çalışan RF güç kaynağı ile kuvars deşarj odasının iki farklı bölgesinde saf neon gazının akan deşarjı elde edilmiştir. Bu farklı iki bölgenin optik emisyon spektrumları 200-1200 nm dalga boyları aralığında elde edilmiştir. Amaç seçilen iki farklı bölge için ayrı ayrı plazma optik özellikleri belirlemektir. Neon akan deşarjı için elde edilen spektral çizgiler 585,248 ve 724,516 nm dalga boyları arasındadır. İndüktif bağlı deşarj sisteminde yaklaşık 0,77 mbar basınçta elde edilen deşarjın spektral çizgilerinin şiddetleri maksimum olarak ortaya çıkmıştır. Her iki deşarj bölgesi için uyarılma ve elektron sıcaklıkları matematiksel modeller ile tahmin edilmiştir.

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Cold plasma chemistry and diagnostics

Cited by 23 publications

References 59 publications

Broad-band high-resolution rotational spectroscopy for laboratory astrophysics

Broad-band high-resolution rotational spectroscopy for laboratory astrophysics

White paper on the future of plasma science for optics and glass

The Properties of Inductive Coupled Radio-Frequency Neon Flowing Discharge at Low-Pressure

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