Combined x‐ray reflectivity and grazing incidence x‐ray fluorescence study of Ta/Cr/Pt thin film stacks

Abstract

The Ta/Cr/Pt three‐layer system can be used as a planar x‐ray waveguide, that is to say it can guide an x‐ray beam inside its chromium layer. This property comes from the difference in density and hence in optical index between the two “heavy” or cladding tantalum and platinum layers and the “light” or guiding chromium layer. The waveguide will be efficient provided the layers are a few nanometers thick and that the interfaces are as sharp as possible. To control the quality of the stack, we combine grazing incidence x‐ray fluorescence (GIXRF) and x‐ray reflectivity (XRR) measurements on a series of Ta/Cr/Pt samples, whose only difference is the thickness of the Cr layer. The three considered samples have been deposited by magnetron sputtering and their designed structures are: Ta (8 nm)/Cr (5, 10, and 15 nm)/Pt (14 nm)/Si substrate. The combination of XRR and GIXRF tightens constraints on the parameters used to simulate the stack: thickness, roughness, composition, and density of the layers and their interlayers. For each sample we used six GIXRF curves obtained from three different characteristic x‐ray lines (Ta Lα, Cr Kα, and Pt Lβ2,15) excited at three different incident photons energies (6.25, 10, and 12 keV) as well as one XRR curve obtained at 6.25 keV. The XRR‐GIXRF combined analysis demonstrates that the Ta/Cr/Pt structure is too simplistic and that it is necessary to introduce some interlayers at the top and bottom of the stacks to obtain a reliable agreement between the experimental and simulated GIXRF and XRR curves.