Commented review on refractive microlenses and microlens arrays metrology

Abstract

The fabrication of high-quality microlenses is possible only when it is assisted by efficient and accurate metrology. For this reason, developing expertise in measurement procedures is crucial for the micro-optics manufacturer. We review and comment on this topic by first discussing what features of microlenses must be characterized and controlled. We then review the existing techniques and instruments that can be employed for this task. Finally, we detail the limitations of these different methods, we compare them, and we propose practical guidelines to setup effective metrology methodology. We believe that this paper can be an introduction to the topic but also serves as a reference document for the more experienced reader. © The Authors.Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.