Compact Integrated Silicon Photonic MEMS Power Coupler For Programmable Photonics

Takabayashi, Alain Yuji; Silva, Duarte; Sattari, Hamed; Edinger, Pierre; Verheyen, Peter; Gylfason, Kristinn B.; Bogaerts, Wim; Quack, Niels

doi:10.1109/mems51670.2022.9699708

Cited by 2 publications

(1 citation statement)

References 13 publications

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“…In addition to out-of-plane actuated tunable couplers, our platform also allows for the implementation of inplane actuated devices. For example, the directional coupler described above can be attached to an in-plane electrostatic comb-drive actuator, and from an initial 150 nm lateral gap, an in-plane displacement of a mere 50 nm is sufficient to achieve full power coupling 57 .…”

Section: Tunable Power Couplers and Switchesmentioning

confidence: 99%

Integrated silicon photonic MEMS

et al. 2023

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Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and quantum information processing. The success of silicon photonics has been enabled by the unique combination of performance, high yield, and high-volume capacity that can only be achieved by standardizing manufacturing technology. Today, standardized silicon photonics technology platforms implemented by foundries provide access to optimized library components, including low-loss optical routing, fast modulation, continuous tuning, high-speed germanium photodiodes, and high-efficiency optical and electrical interfaces. However, silicon’s relatively weak electro-optic effects result in modulators with a significant footprint and thermo-optic tuning devices that require high power consumption, which are substantial impediments for very large-scale integration in silicon photonics. Microelectromechanical systems (MEMS) technology can enhance silicon photonics with building blocks that are compact, low-loss, broadband, fast and require very low power consumption. Here, we introduce a silicon photonic MEMS platform consisting of high-performance nano-opto-electromechanical devices fully integrated alongside standard silicon photonics foundry components, with wafer-level sealing for long-term reliability, flip-chip bonding to redistribution interposers, and fibre-array attachment for high port count optical and electrical interfacing. Our experimental demonstration of fundamental silicon photonic MEMS circuit elements, including power couplers, phase shifters and wavelength-division multiplexing devices using standardized technology lifts previous impediments to enable scaling to very large photonic integrated circuits for applications in telecommunications, neuromorphic computing, sensing, programmable photonics, and quantum computing.

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Section: Tunable Power Couplers and Switchesmentioning

confidence: 99%

Integrated silicon photonic MEMS

et al. 2023

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Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Park,

Her,

Jeong

et al. 2024

Microsyst Nanoeng

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The Fabry-Pérot interferometer, a fundamental component in optoelectronic systems, offers interesting applications such as sensors, lasers, and filters. In this work, we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors (SLRs) and phase shifters based on electrostatic microelectromechanical (MEMS) actuator. The fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication processes. This electrostatic actuation mechanism provides well-balanced, scalable pathways for efficient tuning methodologies. The extinction ratio of the continuously tunable SLRs’ reflectivity is larger than 20 dB. Full 2π phase shifting is achieved, and response times of all the components are less than 25 μs. Both actuators have extremely low static power, measuring under 20 fW and the energy needed for tuning is both below 20 pJ.

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Compact Integrated Silicon Photonic MEMS Power Coupler For Programmable Photonics

Cited by 2 publications

References 13 publications

Integrated silicon photonic MEMS

Integrated silicon photonic MEMS

Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

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