“…Particularly, highly textured PZT films were obtained on (1 0 0)-oriented LNO substrates by the sol-gel technique and showed great improvement in polarization fatigue [9]. At present, many preparation techniques, such as pulsed laser deposition (PLD) [8], metalorganic decomposition (MOD) [10], sol-gel [11], RF magnetron sputtering [12,13] have been used to prepare ferroelectric thin films on perovskite oxides bottom electrodes. Recently, mist plasma evaporation (MPE) has been developed by us to prepare ferroelectric thin films.…”