Comparative first-principles analysis of crystalline versus amorphous CeO2 particles: implications for chemical mechanical planarization

Park, Sungwon; Seo, Jihoon

doi:10.1007/s10853-024-09861-5

J Mater Sci

2024

DOI: 10.1007/s10853-024-09861-5

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Comparative first-principles analysis of crystalline versus amorphous CeO2 particles: implications for chemical mechanical planarization

Sungwon Park,

Jihoon Seo

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Comparative first-principles analysis of crystalline versus amorphous CeO2 particles: implications for chemical mechanical planarization

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References 32 publications

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