Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing

Liu, Nian; Yamada, Hideaki; Yoshitaka, Naoya; Sugimoto, Kentaro; Sun, Rongyan; Kawai, Kentaro; Arima, Kenta; Yamamura, Kazuya

doi:10.1016/j.diamond.2021.108555

Cited by 14 publications

(4 citation statements)

References 29 publications

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“…As shown in figure 8(c), the minimum surface roughness Sq of the SCD (100) substrate polished by this device can reach 0.32 nm. To demonstrate that PAP is a nondestructive polishing technology, Liu et al [120] detected subsurface damage of SCD (100) substrates after MP and PAP through scanning cathodoluminescence (CL) with band A emission (central wavelength = 432 nm). Band A emission is considered to be caused by dislocation, sp 2 hybrid structure, and other internal damage in diamond [121,122].…”

Section: Papmentioning

confidence: 99%

“…Currently, PAP is only successfully used for polishing SCD substrates. In [46,51,119,120], Ar-based oxygen plasma was selected for the PAP of diamond. The polishing accuracy of PAP is extremely high, and [46] the surface roughness Sq of the polished SCD surface is below 0.5 nm, with a maximum MRR of 13.3 µm h −1 .…”

Section: Papmentioning

confidence: 99%

“…The polishing accuracy of PAP is extremely high, and [46] the surface roughness Sq of the polished SCD surface is below 0.5 nm, with a maximum MRR of 13.3 µm h −1 . In addition, in [46,120], the SCD substrate had a large size of 20 mm 2 , indicating that PAP technology has been successfully used for precision polishing of large-sized diamond substrates.…”

Section: Papmentioning

confidence: 99%

See 2 more Smart Citations

Energy beam-based direct and assisted polishing techniques for diamond: A review

Li,

Jiang,

Jiang

et al. 2023

Int. J. Extrem. Manuf.

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Diamond is a highly valuable material with diverse industrial applications, particularly in the fields of semiconductor, optics, and high-power electronics. However, its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond. To address these challenges, several polishing methods have been developed for both single crystal diamond (SCD) and polycrystalline diamond (PCD), including mechanical, chemical, laser, and ion beam processing methods. In this review, the characteristics and application scope of various polishing technologies for SCD and PCD are highlighted. Specifically, various energy beam-based direct and assisted polishing technologies, such as laser polishing, ion beam polishing, plasma-assisted polishing, and laser-assisted polishing, are summarized. The current research progress, material removal mechanism, and influencing factors of each polishing technology are analyzed. Although some of these methods can achieve high material removal rates or reduce surface roughness, no single method can meet all the requirements. Finally, the future development prospects and application directions of different polishing technologies are presented.

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Section: Papmentioning

confidence: 99%

Section: Papmentioning

confidence: 99%

Section: Papmentioning

confidence: 99%

See 1 more Smart Citation

Energy beam-based direct and assisted polishing techniques for diamond: A review

Li,

Jiang,

Jiang

et al. 2023

Int. J. Extrem. Manuf.

View full text Add to dashboard Cite

show abstract

“…Oxygenplasma functionalisation of oral implant biomaterials is used for controlling implant surface wettability [22]. Surface and subsurface damage of a mosaic single-crystal diamond (100) substrate can be cured through plasma-assisted polishing [23]. Moreover, surface chemical and surface function modification by plasma can effectively improve the gas sensing performance of sensors [24].…”

Section: Introductionmentioning

confidence: 99%

Oxygen-plasma-assisted formaldehyde adsorption mechanism of SnO₂ electrospun fibers

Zhang

et al. 2022

Nanotechnology

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Chemisorbed oxygen acts a crucial role in the redox reaction of semiconductor gas sensors, and which is of great significance for improving gas sensing performance. In this study, an oxygen-plasma-assisted technology is presented to enhance the chemisorbed oxygen for improving the formaldehyde sensing performance of SnO2 electropun fiber. An inductively coupled plasma device was used for oxygen plasma treatment of SnO2 electrospun fibers. The surface of SnO2 electrospun fibers was bombarded with high-energy oxygen plasma for facilitating the chemisorption of electronegative oxygen molecules on the SnO2 (110) surface to obtain an oxygen-rich structure. Oxygen-plasma-assisted SnO2 electrospun fibers exhibited excellent formaldehyde sensing performance. The formaldehyde adsorption mechanism of oxygen-rich SnO2 was investigated using density functional theory. After oxygen plasma modification, the adsorption energy and the charge transfer number of formaldehyde to SnO2 were increased significantly. And an unoccupied electronic state appeared in the SnO2 band structure, which could enhance the formaldehyde adsorption ability of SnO2. The gas sensing test revealed that plasma-treated SnO2 electrospun fibers exhibited excellent gas sensing properties to formaldehyde, low operating temperature, high response sensitivity, and considerable cross-selectivity. Thus, plasma modification is a simple and effective method to improve the gas sensing performance of sensors.

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Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing

Liu

Sugimoto

Yoshitaka

et al. 2023

Ceramics International

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Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing

Cited by 14 publications

References 29 publications

Energy beam-based direct and assisted polishing techniques for diamond: A review

Energy beam-based direct and assisted polishing techniques for diamond: A review

Oxygen-plasma-assisted formaldehyde adsorption mechanism of SnO₂ electrospun fibers

Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing

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Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing

Cited by 14 publications

References 29 publications

Energy beam-based direct and assisted polishing techniques for diamond: A review

Energy beam-based direct and assisted polishing techniques for diamond: A review

Oxygen-plasma-assisted formaldehyde adsorption mechanism of SnO2 electrospun fibers

Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing

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Product

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Oxygen-plasma-assisted formaldehyde adsorption mechanism of SnO₂ electrospun fibers