Comparison of vacuum ultraviolet irradiation and oxygen plasma treatment as pretreatment for copper seed layer on cycloolefin polymer
Akihiro Shimizu,
Kazuhiro Fukada,
Shinichi Endo
et al.
Abstract:This study explores the factors governing the peel strength characteristics between a cycloolefin polymer (COP) film and a copper plating layer with a copper seed layer, for applying to antenna circuits in 6G communications. The peel strength depended on the surface modification methods as pretreatment for copper seed layer formation: vacuum ultraviolet (VUV) irradiation and oxygen plasma treatment. VUV irradiation induced a modified layer with brittleness on the COP surface, leading to substrate failure. Conv… Show more
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