Noble metal nanoparticles exhibit unique plasmon resonances compared to bulk metal that depends on the nanoparticle size, shape, and interparticle distance. Towards this goal, the paper describes a simple and low-cost method for producing large area arrays of ordered silver nanoparticles with morphologies such as dots, rings, and bowls, based on the nanosphere lithography by combining evaporation and sputtering techniques. Pronounced, we demonstrate here a facile fabrication strategy that nanosphere monolayer could serve as a sacrificial mask access to generate silver nanobowl arrays. The experimental and simulated results show that the Ag nanodot arrays exhibit a satisfactory surface-enhanced Raman spectroscopy effect and adjustable frequency. These approaches will surely facilitate further exploration of metal nanostructures for applications in nanoscale optical sensors.