1983
DOI: 10.1070/pu1983v026n11abeh004538
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Computer-aided tomography and physical experiment

Abstract: The barrier properties of divinyl siloxane-benzocyclobutene (DVS-BCB) films formed by plasma-enhanced polymerization were studied for ultralow-k porous silica (po-SiO) interlayer dielectrics. Time-dependent dielectric breakdown (TDDB) measurements of blanket Cu/BCB/Si metal-insulator-semiconductor (MIS) capacitors showed no polarity dependence of the bias-temperature stresses at 200 C under 2 MV/cm, indicating that Cu ions hardly drifted into the BCB film with the positive bias stress. On the other hand, Cu/Si… Show more

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Cited by 9 publications
(4 citation statements)
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“…Our data are streaked and only 1D in space, in direction perpendicular to the target surface. So, it is not possible to perform the Abel inversion [13] procedure, which is usually associated with the analysis of interferometric data [4].…”
Section: Resultsmentioning
confidence: 99%
“…Our data are streaked and only 1D in space, in direction perpendicular to the target surface. So, it is not possible to perform the Abel inversion [13] procedure, which is usually associated with the analysis of interferometric data [4].…”
Section: Resultsmentioning
confidence: 99%
“…Here we also demonstrate behavior of solution k mα (r) derived with Tikhonov regularization using (27), (29), (30) and (9). Regularization parameter α is chosen using discrepancy principle (28) where δ = 0.037, as a result α = 10 −0.09 = 0.813. Fig.…”
Section: Infrared Tomography Examplementioning
confidence: 86%
“…The subscript in the formula for the operator R-of Radon inversion is used because Radon inversion is an unstable procedure, and thus regularization must be used [3].…”
Section: Rmentioning
confidence: 99%