2016
DOI: 10.1017/s1431927616002889
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Conditions for Low Voltage Microanalysis and X-ray Mapping

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“…The microscopy imaging was mainly operated at an accelerating voltage of 10 kV and a probe current of 30 pA. The EDS quantitative analysis was performed with an accelerating voltage of 15 kV and a probe current of 100 pA. EDS elemental mapping was obtained at 5 kV and 100 pA to increase the spatial resolution 21 …”
Section: Methodsmentioning
confidence: 99%
“…The microscopy imaging was mainly operated at an accelerating voltage of 10 kV and a probe current of 30 pA. The EDS quantitative analysis was performed with an accelerating voltage of 15 kV and a probe current of 100 pA. EDS elemental mapping was obtained at 5 kV and 100 pA to increase the spatial resolution 21 …”
Section: Methodsmentioning
confidence: 99%