J Mater Sci: Mater Electron
 2014
DOI: 10.1007/s10854-014-1772-y
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Conduction and field induced degradation in thin ZrO2 films sputtered in nitrogen containing plasma on silicon

Ashwath Rao
1
,
Joyline Dsa
2
,
Saurabh Goyal
3
et al.
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Influence of power on the physical and electrical properties of magnetron sputtered gadolinium oxide thin films for MOS capacitors

Thilipan
1
,
Rao
2
2021
Materials Science in Semiconductor Processing
7
0
1
0
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Influence of power on the physical and electrical properties of magnetron sputtered gadolinium oxide thin films for MOS capacitors

Thilipan
1
,
Rao
2
2021
Materials Science in Semiconductor Processing
7
0
1
0
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Ionizing radiation effects on electrical and reliability characteristics of sputtered Ta2O5/Si interface

Rao
1
,
Verma
2
,
Singh
3
2015
Radiation Effects and Defects in Solids
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Swift ion irradiation effect on high-k ZrO2- and Al2O3-based MOS devices

Rao
1
,
Chaurasia
2
,
Singh
3
2016
Radiation Effects and Defects in Solids
7
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2
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