Correction of characteristics compound longitudinal piezodrive at elastic inertial load for nanorobotics research

Abstract

The compound longitudinal piezodrive is used in scanning microscopy, adaptive optics of compound telescope, nanotechnology. For nanorobotics research the compound longitudinal piezodrive is applied. The characteristics of the compound longitudinal piezodrive are determined. Its time constant are founded. The parameters of the compound longitudinal piezodrive for control system with negative feedback on the displacement inductive sensor or on the piezoaccelerometer are determined.