Correlation between Copper Precipitation and Grown-In Oxygen Precipitates in 300~mm Czochralski Silicon Wafer

Dong, Peng; Y., X.; Yang, Deren

doi:10.12693/aphyspola.125.972

Acta Phys. Pol. A

2014

DOI: 10.12693/aphyspola.125.972

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Correlation between Copper Precipitation and Grown-In Oxygen Precipitates in 300~mm Czochralski Silicon Wafer

Peng Dong

X. Y.

Deren Yang

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Correlation between Copper Precipitation and Grown-In Oxygen Precipitates in 300~mm Czochralski Silicon Wafer

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