Correlation between the growth and gasification processes of carbon

Erosion of a-C:H films under interaction with nitrous oxide afterglow discharge

“…5). Very low energies of the graphite gasification activation in air plasma (%0.1 eV) were reported in the literature [8]. The obtained effective activation energies turned out to be much lower than the activation desorption energies of molecules CO (3.3 eV) and CO 2 (about 1 eV) [9].…”