Correlation of Mechanical Properties with Surface Morphology of Diamond-Like Carbon Films Deposited By Plasma Enhanced Chemical Vapour Deposition Technique

Abstract

Diamond like carbon (DLC) films are deposited on glass substrates by using radio frequency plasma enhanced chemical vapour deposition technique with the variation of RF power. DLC films are deposited by using argon and acetylene plasma, at pressure 5×10-2 mbar for 60 minutes. Various properties like surface morphology, hydrophobicity, nanohardness, and structural properties are studied by using atomic force microscope, contact angle measurement setup, nano-hardness tester and Raman spectrometer, respectively. Systematic variation in surface morphology with RF power has been observed. It has been observed that the morphology of the films is correlated with the hardness, sp3 content, roughness, and contact angle. Observed results have been explained using Raman spectra.