Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films

Abstract

Articles you may be interested inStructure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology Structure and mechanical properties of nanoscale multilayered CrN/ZrSiN coatings J.

Hardness and modulus of elasticity of atomic layer deposited Al2O3-ZrO2 nanolaminates and mixtures

“…Depending on the conditions (substrate temperature, deposition environment pressure etc. ), composition and used methods, carbides can possess hardnesses from 9 to 35 GPa [37][38][39][40][41][42][43]. The higher hardness values are usually obtained at higher temperatures than 300 � C and enable development of harder films (20)(21)(22)(23)(24)(25)(26)(27)(28)(29)(30)(31)(32)(33)(34)(35).…”

“…The higher hardness values are usually obtained at higher temperatures than 300 � C and enable development of harder films (20)(21)(22)(23)(24)(25)(26)(27)(28)(29)(30)(31)(32)(33)(34)(35). In this regard, the deposited ALD thin films showed comparable or even higher values [37][38][39].…”

Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness

“…Research has been done on the effect of pressure and nitrogen on the hardness of the Si-C-N coatings [10][11][12][13][14][15][16][17]. The research on different aspect of single-layer hard SiCN coatings has also been reported by one of the authors Mishra et al in the literature, where it showed very fine nanocrystalline dispersion of size 2-10 nm in SiCN amorphous matrix [18,19]. The films were very hard ranging between 10 and 35 GPa dependent on the deposition parameters.…”

Enhanced surface hardness of flexible polycarbonate substrates using plasma-polymerized organosilicon oxynitride films by air plasma jet under atmospheric pressure

“…6a-b. The peaks of the spectra are shown in Table 4 with the respective chemical groups referring to [18,24,32,33]. The analysis reveals that the dominant peaks include SiO x in-phase stretching and the Si-O Table 7 Binding energies of chemical bonds corresponding with the XPS spectra of Si 2p , O 1s , and C 1s .…”