Proceedings of the 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005.

DOI: 10.1109/ipfa.2005.1469181

|View full text |Cite

|

Sign up to set email alerts

|

Couple passive voltage contrast with scanning probe microscope to identify invisible defect out

¹

,

²

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

0

Mentioning

0

Contrasting

0

Publication Types

Select...

Other2

Article1

Relationship

Self Cite0

Independent3

Authors

Journals

Cited by 3 publications

References 2 publications

Supporting

0

Mentioning

0

Contrasting

0

Order By: Relevance

Use of Nanoprobing as the Diagnostic Tool for Nanoscaled Devices

¹

,

²

,

³

et al. 2007

2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits

View full text Add to dashboard Cite

No abstract

Use of Nanoprobing as the Diagnostic Tool for Nanoscaled Devices

¹

,

²

,

³

et al. 2007

2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits

View full text Add to dashboard Cite

No abstract

Investigation of EOS damage issue induced by failure analysis on back-end test vehicle

¹

,

²

,

³

2013

Proceedings of the 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

View full text Add to dashboard Cite

Back-end Test Vehicle (BTY) test-key responds to BEOL status effectively. In different process node, it can assist in monitoring real product process inline BEOL status by using fewer process steps. FA is very important steps to confirm the failure Device-Under-Test (DUT) for yield improvement in the BTV validation flow. FA has more and more challenges in advanced process nodes, one of them is EOS damage issue, which issue occurred during the BTV test-key failure analysis in advanced process node. The EOS didn't come out previous process node and above. This paper will investigate which FA steps on earth happened EOS damage, after that, EOS root cause and solved method was discussed base on experiment result.

In-Depth Electrical Analysis to Reveal the Failure Mechanisms With Nanoprobing

¹

,

²

,

³

et al. 2008

IEEE Trans. Device Mater. Relib.

View full text Add to dashboard Cite

No abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Product

Browser Extension Assistant by scite Citation Statement Search Reference Check Visualizations Dashboards Explore Journals Explore Organizations Explore Funders Embedding Badge Embedding Citation Search Pricing

Resources

Blog Help & FAQ Accessibility Statement API Terms For Universities & Governments For Researchers For Publishers For Corporate, Pharma & Enterprise Author Marketing Become an Affiliate Get an organization trial or quote scite Data & Services

About

News & Press Careers Read our Paper Coverage

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Copyright © 2025 scite LLC. All rights reserved.

Made with 💙 for researchers

Part of the Research Solutions Family.