1985
DOI: 10.1016/0040-6090(85)90466-3
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Coverage of Si substrates by self-assembling monolayers and multilayers as measured by IR, wettability and X-ray diffraction

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Cited by 167 publications
(108 citation statements)
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“…Their precise common value z SK ∼ 58 Å can be rationalized in the following way. Starting from the solid surface at z = 0, the dense OTS layer, including silane and alkyl portions has a thickness of d 1 ∼ 25 Å, as reported in previous reflectometry studies (27,28). The thickness of the first (inner) monolayer of SGS with its C 16 /C 17 alkyl chains and the saccharide headgroup can be estimated as d 1 ∼ 20-25 Å.…”
Section: Resultsmentioning
confidence: 67%
“…Their precise common value z SK ∼ 58 Å can be rationalized in the following way. Starting from the solid surface at z = 0, the dense OTS layer, including silane and alkyl portions has a thickness of d 1 ∼ 25 Å, as reported in previous reflectometry studies (27,28). The thickness of the first (inner) monolayer of SGS with its C 16 /C 17 alkyl chains and the saccharide headgroup can be estimated as d 1 ∼ 20-25 Å.…”
Section: Resultsmentioning
confidence: 67%
“…One of the interesting compounds useful for MEMS lubrication is n-octadecyltrichlorosilane (OTS), n-C 18 H 37 SiC 13 which gives complete coverage of smooth surfaces of n-type silicon by densely packed monolayers formed by chemisorption of silane compounds incorporated in solutions [55]. Sliding experiments with glass spheres and p-type smooth silicon wafers coated with n-C 18 H 37 SiC 13 , n-C 11 H 23 SiC 13 (UTS), and n-C 6 F 13 CH 2 CH 2 SiC 13 (FTS) [55] have shown insignificant wear and relatively low friction for OTS and UTS monolayers (friction coefficients 0.07 and 0.09, respectively), and significantly higher friction (friction coefficient 0.16) and wear for FTS monolayers, presumably due to incomplete coverage of silicon surface by the thinner (1 nm) FTS monolayers.…”
Section: Lubrication and Modification Of Mems Surfacesmentioning
confidence: 99%
“…These molecules react faster with the silanol groups of the surface and also due to self-assembling character of the long alkyl chains, as result of the lateral van der Waal forces between the alky chains, are able to form densely packed highly ordered monomolecular assemblies with solidstate-like properties. 25 Unfortunately, the use of APS analogues with long alkyl chains such as (17-aminoheptadecil)-trimethoxysilane, does not give rise to well ordered monolayers. 26 This is very likely due to the hydrogen bond formation between the amine group and silanol surface.…”
Section: Short Survey In Chemical Modification Of Surfacesmentioning
confidence: 99%