Crystal and Electronic Structure of β‐Nb2N Thin Films Grown by Molecular Beam Epitaxy
Jianghao Yao,
Tongrui Li,
Aomiao Zhi
et al.
Abstract:Niobium nitrides have garnered significant research interest since their discovery due to their exceptional properties and broad applications. In this study, NbNx thin films are successfully grown on 4H(6H)‐SiC(001) substrates using nitrogen‐assisted molecular beam epitaxy. Through scanning transmission electron microscopy and X‐ray diffraction, it is confirmed that the crystal structure of the thin films corresponds to the β‐Nb2N. Different from the previously reported structure of the βA phase (P63/mmc) of β… Show more
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